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Journal Articles

Enhancement of electrical activation of aluminum acceptors in 6H-SiC by co-implantation of carbon ions

Oshima, Takeshi; Ito, Hisayoshi; Yoshikawa, Masahito

Materials Science Forum, 353-356, p.575 - 578, 2001/00

no abstracts in English

Journal Articles

Electrical Properties of carbon/aluminum-implanted 6H-SiC

Oshima, Takeshi; Ito, Hisayoshi; Yoshikawa, Masahito

Proceedings of 1st International Workshop on Ultra-Low-Loss Power Device Technology (UPD2000), p.181 - 182, 2000/06

no abstracts in English

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